Method of manufacturing a solid state imaging device

Details Method of manufacturing a solid state imaging device Method of manufacturing a solid state imaging device

1995-03-23

1996-07-09

Thomas, Tom

Fishing, trapping, and vermin destroying

437 3, 437 5, H01L 3118

Patent

active

055344437

ABSTRACT:
The method of manufacturing a solid state imaging device of the invention comprises a step of adding carboxylate as a dyeing assistant auxiliary to the aqueous dyestuff solution when forming dyeing layers of acrylic-based resin on a semiconductor substrate on which a solid state imaging element is formed. Therefore this invention provides a solid state imaging device with a color filter which is dyed densely, is flat, thin, and excellent in spectral characteristics. A transparent planarization resin layer (the material is e.g. acrylic) is formed on a semiconductor substrate, and a shading layer and planarization resin layer are successively formed thereon. A synthetic resin is prepared and added photosensitizer of diazo compound. On the above-mentioned planarization resin layer, the layer of the synthetic resin is coated to be 0.2 to 0.8 .mu.m thick, for example, by a spin coat method. Then the synthetic resin is selectively exposed with a stepper, and developed to form patterns of a color filter. Then, the resin with the pattern is dyed to be a cyan layer. In the step, ammonium acetate and a urea compound are added to the aqueous dyestuff solution.

REFERENCES:
patent: 3963495 (1976-06-01), Kato et al.
patent: 4052379 (1977-10-01), Gourley
patent: 5404005 (1995-04-01), Shimomura et al.

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