Surface acoustic wave device and production process thereof

Details Surface acoustic wave device and production process thereof Surface acoustic wave device and production process thereof

1997-05-23

1998-06-30

Budd, Mark O.

Electrical generator or motor structure

Non-dynamoelectric

Piezoelectric elements and devices

310313A, H01L 4108

Patent

active

057739170

ABSTRACT:
This invention relates to a surface acoustic wave device and a production process thereof. An electrode is formed by alternately laminating a film of an aluminum alloy containing at least copper added thereto and a copper film on a piezoelectric substrate. While the particle size of the multi-layered electrode materials is kept small, the occurrence of voids in the film is prevented and life time of the surface acoustic wave device is elongated.

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Patent Abstracts of Japan, vol. 8, No. 84 (E-239), Apr. 18, 1984 & JP-A-59 005724 (Murata Seisakusho K.K.), Jan. 12, 1984.

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