Method and apparatus for measuring optical constants of a thin f

Details Method and apparatus for measuring optical constants of a thin f Method and apparatus for measuring optical constants of a thin f

1990-02-15

1992-06-30

Rosenberger, Richard A.

Optics: measuring and testing

Refraction testing

356135, 356137, G01N 2141

Patent

active

051257408

ABSTRACT:
A sample is located so as to be close to a prism and a light beam coming from a light source is projected to the prism while varying the incident angle to the prism as a parameter. The incident light beam to the prism is propagated therein and light emerging from the bottom surface of the prism, which is in contact with the sample, is projected to the sample. At the same time the intensity of light reflected by the bottom surface of the prism is measured. Optical constants such as the refractive index, the film thickness, the distribution of the refractive index, etc. are obtained by calculation, starting from measured values thus obtained.

REFERENCES:
patent: 3645631 (1972-02-01), Gupta
patent: 3746450 (1973-07-01), Smith, Jr.
patent: 3770352 (1973-11-01), White
patent: 3873209 (1975-03-01), Schinke et al.
patent: 4746179 (1988-05-01), Dahne et al.
"Light Waves in Thin Films and Integrated Optics", Applied Optics, vol. 10, No. 11, (1971), pp. 2395-2413.

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