Electricity: electrical systems and devices – Electrostatic capacitors – Fixed capacitor
Patent
1996-10-22
1998-05-19
Kincaid, Kristine L.
Electricity: electrical systems and devices
Electrostatic capacitors
Fixed capacitor
361305, 361322, H01G 406, H01G 4008, H01G 410
Patent
active
057543925
ABSTRACT:
Dielectric material of nominal composition (Al.sub.2 O.sub.3).sub.x (Ta.sub.2 O.sub.5).sub.1-x, with 0.03<x<0.15, unexpectedly can exhibit a relatively small temperature variation of the dielectric constant (e.g., <50 ppm/.degree.C. at 1 MHz and 20.degree. C.) and a relatively large value of the dielectric constant. The dielectric according to the invention advantageously is used in capacitive elements, e.g., in MOS capacitors in integrated circuits for personal communication devices.
REFERENCES:
patent: 4054531 (1977-10-01), Takahashi et al.
patent: 4219866 (1980-08-01), Maher
patent: 4223369 (1980-09-01), Burn
patent: 4812426 (1989-03-01), Takagi et al.
"Electrical Properties of Al.sub.2 O.sub.3 -Ta.sub.2 O.sub.5 Composite Dielectric Thin Films Prepared by RF Reactive Sputtering", by K. Nomura, Journal of the Electrochemical Society, Solid-State Science And Technolgy, vol. 134, No. 4, Apr. 1987, pp. 922-925.
"Some Properties of RF Sputtered Al.sub.2 O.sub.3 -Ta.sub.2 O.sub.5 Composite Thin Films", by K. Nomura, J. Electrochem. Soc., vol. 138, No. 12, Dec. 1991, pp. 3701-3705.
Dinkins Anthony
Kincaid Kristine L.
Pacher Eugen E.
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