Serial evaporator for vacuum vapor depositing apparatus

Details Serial evaporator for vacuum vapor depositing apparatus Serial evaporator for vacuum vapor depositing apparatus

1991-09-24

1993-11-23

Walberg, Teresa J.

Electric resistance heating devices

Heating devices

Vaporizer

118726, C23C 1400

Patent

active

052651894

ABSTRACT:
In a row evaporator for vacuum vapor depositing apparatus, having a plurality of conductively heated evaporator cells (5, 5', . . . ) disposed in the process chamber (11) and individually controllable in output, and connected to jaw-like electrical contacts (3, 3', . . . ; 4, 4', . . . ), the jaw-like contacts are held by an electrically conductive supporting body (6) extending over the entire length of the row evaporator, while the contacts (3, 3', . . . ) of the one polarity are electrically connected to the supporting body (6), and the contacts (4, 4', . . . ) of the other polarity are subject to the action of a plunger (9, 9', . . . ) which is configured as a cylindrical bolt and is brought outwardly through the wall (10) of the process chamber so as to be vacuum-tight yet longitudinally displaceable, so that the cross-sectional area of this plunger (9, 9', . . . ) remains exposed to atmospheric pressure during the operation of the apparatus, and then presses the contacts or jaws (4, 4', . . . ) against their individual evaporator cells (5, 5', . . . ) with sufficiently measured force.

REFERENCES:
patent: 2969448 (1961-01-01), Alexander
patent: 3117887 (1964-01-01), Shepard
patent: 3271209 (1966-09-01), Rummel
patent: 3387116 (1968-06-01), Dupuis
patent: 3537886 (1970-11-01), Rively
patent: 3861353 (1975-01-01), Erhart
patent: 5068915 (1991-11-01), Heinz
U.S. patent application Ser. No. 574,595 dated Aug. 29, 1990, Kleyer.

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