Fluid pressure sensing unit incorporating diaphragm deflection s

Measuring and testing – Fluid pressure gauge – With protective separator

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73718, G01L 700, G01L 912

Patent

active

057538204

ABSTRACT:
A sensing unit includes a re-usable portion which is isolated from system fluids and a disposable portion. The disposable portion includes an enclosure that defines an internal cavity with one wall of the enclosure being constituted by a flexible diaphragm that is exposed to operating pressure of the system. The re-usable portion has mounted therein a sensing array at a position adjacent to a non-system pressure side surface of the diaphragm. The sensing array includes a plurality of sensing elements which are arranged as radial inner and outer sets with each set being adapted to preferentially sense a deflection of a central portion of the diaphragm. An output signal representative of the fluid pressure in the fluid system is established based on a ratio of deflection signals from the sets of sensing elements. Preferably, the sensing elements constitute capacitive plates that have equally exposed surface areas.

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