Method for etching a tungsten film

Details Method for etching a tungsten film Method for etching a tungsten film

1996-06-14

1998-05-19

Niebling, John

Fishing, trapping, and vermin destroying

437190, 437246, 1566461, 1566561, H01L 2128

Patent

active

057535337

ABSTRACT:
The invention provide a method for manufacturing a wire by etching a metallic film involving a high melting point metal without side etching. When a tungsten film 4c is etched by a mixed gas involving SF.sub.6 and N.sub.2, tungsten nitride films 14 are formed on side walls of an tungsten film 4c being etched, and said tungsten nitride films 14 serve as protector against etching. The selected figure is FIG. 5.

REFERENCES:
patent: 4948462 (1990-08-01), Rossen
patent: 5024722 (1991-06-01), Cathey, Jr.
patent: 5273609 (1993-12-01), Moslehi
patent: 5347696 (1994-09-01), Willer et al.
patent: 5376585 (1994-12-01), Lin et al.
patent: 5378309 (1995-01-01), Rabinzohn

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