Vibrating type angular velocity sensor

Details Vibrating type angular velocity sensor Vibrating type angular velocity sensor

1997-12-30

2000-10-03

Kwok, Helen C.

Measuring and testing

Speed, velocity, or acceleration

Angular rate using gyroscopic or coriolis effect

7350414, G01P 904

Patent

active

061257001

ABSTRACT:
A vibrating type angular velocity sensor is comprised of: a driving vibrator element 8 supported by a first beam 9 fixed by an anchor portion 3 on a substrate, and driven by a driving comb electrode 12 along an X-axial direction parallel to the substrate; a detecting vibrator element 10 supported by a second beam 11 on the driving vibrator element and being vibratable along a Y-axial direction; and detection electrodes 14 and 15 of an electric capacitance provided with separated from the detecting vibrator element, and the detection electrodes along the X-axial direction, whereby an angular velocity while setting a Z-axial direction perpendicular to the substrate as an axis is detected. Furthermore, the driving vibrator element is fixed on the substrate by way of two sets of the anchor portions arranged at positions symmetrical to each other with respect to the detecting vibrator element. Also, one of the detection electrodes is arranged on the detecting vibrator element, and the other of the detection electrodes is arranged on the driving vibrator element with separated from each other by an equi-interval space.

REFERENCES:
patent: 5488863 (1996-02-01), Mochida et al.
patent: 5604312 (1997-02-01), Lutz
patent: 5889207 (1999-03-01), Lutz
patent: 5895851 (1999-04-01), Kano et al.
patent: 5945599 (1999-08-01), Jujiyoshi et al.
patent: 5945600 (1999-08-01), Touge et al.
"Micromechanical Tuning Folk Gyroscope Test Results" written by M. Weiberg et al., AIAA-94-3687-CP.

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