Method and apparatus for real-time speckle interferometry for st

Details Method and apparatus for real-time speckle interferometry for st Method and apparatus for real-time speckle interferometry for st

1994-04-04

1995-06-20

Turner, Samuel A.

Optics: measuring and testing

Material strain analysis

By light interference detector

356357, 73800, G01L 124

Patent

active

054264987

ABSTRACT:
A displacement measuring method and device is disclosed in which speckle amplitude interferometry within a single speckle feature or a small number of features of a speckle pattern is used to achieve sub-fringe accuracy with a single detector and to measure displacement of the object under investigation with sub-wavelength accuracy at measurement speeds consistent with real-time control of manufacturing processes. The same technique applied to multiple spots on a sample with optical means for causing interference between different combinations of scattered fields, including fields from different illuminated spots, permits measurements of the total sample motion.

REFERENCES:
patent: 4322162 (1982-03-01), McKelvie et al.
patent: 5061860 (1991-10-01), Takemori
R. Dandliker et al; Measuring Microvibrations by Heterodyne Speckle interferometry; Dec. 4, 1980; pp. 165-167.
Laser Speckle and Related Phenomena; 1975; pp. 1-7; Dainty, J. C.
Speckel Metrology; 1993; Sirohi, R.; pp. V-IX.
Donald E. Duffy; Moire Gauging of In Plane Displacement Using Double Aperature Imaging; Aug. 1972; pp. 1778-1781.
Rene Dandliker; Heterodyne Holographic Interferometry; 1980; pp. 3-84, Book Author Wolf, E., Progress In Optics XVII.

Affiliated with

Also associated with

Rating

Method and apparatus for real-time speckle interferometry for st does not yet have a rating. At this time, there are no reviews or comments for this patent.

If you have personal experience with Method and apparatus for real-time speckle interferometry for st, we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Method and apparatus for real-time speckle interferometry for st will most certainly appreciate the feedback.

Rate now

Comments { 0 }

Profile ID: LFUS-PAI-O-1848042