Etching a substrate: processes – Forming or treating article containing magnetically...
Patent
1994-06-21
1995-06-20
Fourson, George
Etching a substrate: processes
Forming or treating article containing magnetically...
437229, 216 67, H01L 213065
Patent
active
054258448
ABSTRACT:
After forming a magnetic material contained layer on a substrate, a etching region of the magnetic material contained layer is scanned by a magnetic head, to arrange magnetic polarization in one direction. The magnetic material contained layer is separated into a ferro magnetic region which magnetic polarization is arranged in one direction, and a feeble magnetic region which magnetic polarization is not arranged in one direction. Thereafter, the ferro magnetic region is removed by use of a difference between etching rates caused by density of the magnetic fields of these two regions.
REFERENCES:
patent: 3650860 (1972-03-01), Rolker
patent: 4292120 (1981-09-01), Nacci
"The Condensed Chemical Dicitonary", G. Hawley, p. 379, 1977, Van Nostrand & Co.
Bilodeau Thomas G.
Fourson George
Kabushiki Kaisha Toshiba
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