Electroetch and chemical mechanical polishing equipment

Details Electroetch and chemical mechanical polishing equipment Electroetch and chemical mechanical polishing equipment

1999-03-04

2000-05-23

Butler, Rodney A.

Abrading

Abrading process

Glass or stone abrading

451287, B24B 100, B24B 2900

Patent

active

060660309

ABSTRACT:
An apparatus for removing material from a substrate including a single platform comprising elements for performing electroetching and chemical mechanical polishing. A polishing head engages a surface of the substrate to polish the substrate. A cathode for electroetching material from the substrate. A substrate support supports a substrate to be treated. At least one slurry introduction port introduces polishing slurry between the polishing head and the substrate. A power supply supplies power to the anode and the cathode.

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