Method for making diaphragm-based sensors and apparatus construc

Details Method for making diaphragm-based sensors and apparatus construc Method for making diaphragm-based sensors and apparatus construc

1994-03-24

1997-11-04

Ahmad, Nasser

Etching a substrate: processes

Adhesive or autogenous bonding of two or more...

73718, 73721, 1566261, 1566291, 1566331, 1566531, 1566621, 216 2, 216 39, 437225, 437228, 437921, B32B 3100

Patent

active

056835949

ABSTRACT:
This patent relates to the fabrication of diaphragm-based microstructures used primarily for sensing physical phenomena by detecting a change in deflection, resonance, or curvature of the diaphragm. The methods of fabrication described and claimed herein relate primarily to diaphragm-based diaphragms made of silicon, either single crystal or polycrystalline in form, although other materials may be used.

REFERENCES:
patent: 4565096 (1986-01-01), Knecht
patent: 5004705 (1991-04-01), Blackstone
patent: 5344523 (1994-09-01), Fung

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