Method for manufacturing a thin film actuated mirror array

Details Method for manufacturing a thin film actuated mirror array Method for manufacturing a thin film actuated mirror array

1996-03-04

1997-11-04

Powell, William

Etching a substrate: processes

Forming or treating optical article

216 18, 216 39, 216 99, B44C 122, C03C 1500

Patent

active

056835930

ABSTRACT:
An inventive method for manufacturing an array of thin film actuated mirrors for use in an optical projection system includes the steps of: (1) providing an active matrix; (2) depositing a thin film sacrificial layer; (3) ion-implanting the thin film sacrificial layer; (4) creating an array of empty cavities; (5) depositing an elastic layer; (6) forming an array of conduits; (7) depositing a second thin film, a thin film electrodisplacive and a first thin film layers, successively, thereby forming a multiple layered structure; (8) patterning the multiple layered structure into an array of semifinished actuated mirrors; (9) forming a thin film protection layer covering each of the semifinished actuated mirrors; (10) removing the thin film sacrificial layer by using an etchant; (11) rinsing away the etchant by using a rinse; (12) removing the rinse; and (13) removing the thin film protection layer, thereby forming the array of thin film actuated mirrors.

REFERENCES:
patent: 5589084 (1996-12-01), Ji et al.

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