Data-hiding and skew scan for unioning of shapes in electron bea

Details Data-hiding and skew scan for unioning of shapes in electron bea Data-hiding and skew scan for unioning of shapes in electron bea

1992-12-31

1995-08-29

Trammell, James P.

Boots, shoes, and leggings

364491, G05B 1918

Patent

active

054466490

ABSTRACT:
A process and system for developing control signals for an electron beam lithography tool uses Cartesian and modified Cartesian processing of data representing edges of a pattern to be formed. Non-Cartesian data is masked by the generation of least enclosing rectangles to contain it. A skew scan technique later applied to the data so masked allows high speed substantially Cartesian processing of the non-Cartesian data. Edge data is segregated by angles to eliminate virtually all searching to establish edge processing order and processing speed is thus increased by approximately an order of magnitude in comparison with prior techniques and arrangements.

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