Stage device

Details Stage device Stage device

1994-01-26

1995-08-29

Wintercorn, Richard A.

Photocopying

Projection printing and copying cameras

Step and repeat

318649, G03B 2742

Patent

active

054465192

ABSTRACT:
A stage device is provided with a base plate supported by an antivibration device; a table supported by the base plate through a driving shaft in substantially rigid manner; and a first drive system for placing the table in a predetermined position on the base plate. A second drive systems is provided for applying, to the table, an acceleration the same as that of the base plate, in order to correct the relative positional aberration between the base plate and the table, induced by the vibration of the base plate generated when the table is driven by the first drive system.

REFERENCES:
patent: 4525659 (1985-06-01), Imahashi et al.

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