Methods and apparatus for energy analysis and energy filtering o

Radiant energy – Electron energy analysis

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250296, H01J 3900

Patent

active

041467876

ABSTRACT:
The selection of charged particles having a narrow band of kinetic energies from emitted charged particles having a wider band of kinetic energies by repulsing those particles having energies less than the lower energy in the transmitted energy band through means of a similarly charged barrier and in the same device insufficiently deflecting the higher energy particles which pass the barrier by a field provided beyond the barrier whereby they fail to pass through an exit aperture. Thus only particles having energies within the desired band pass through an exit aperture which is disposed on the opposite side of the barrier. The pass band of energies is variable in width and location, and the width of the band may be independent or a function of the energy in the band depending on the potentials applied to the barrier and the strength of the field beyond the barrier. When used as an anaylzer for secondary ions which are to be mass analyzed, a thermionic electron source within the analyzer provides a source of ions representative of the residual gas in the vacuum for the purposes of residual gas analysis.

REFERENCES:
patent: 3710103 (1973-01-01), Helmer
patent: 3783280 (1974-01-01), Watson
patent: 3818228 (1974-06-01), Palmberg

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