Mask making process

Details Mask making process Mask making process

1990-08-17

1992-02-18

Bowers, Jr., Charles L.

Radiation imagery chemistry: process, composition, or product th

Radiation modifying product or process of making

Radiation mask

430314, 430316, 430318, 430323, 430324, 156643, 156656, 1566591, 156904, G03F 100, G03F 726

Patent

active

050893610

ABSTRACT:
A method for making lithographic masks using a soda lime glass substrate that is useful particularly in the manufacture of near submicron and submicron integrated circuits. The problem of "mouse nipping" at the edges of the chromium metal and chromium oxide mask lines is overcome by using a very thin high molecular weight coating under the standard resist layer and over the chromium oxide layer.

REFERENCES:
patent: 3715244 (1973-02-01), Szupillo
patent: 3729316 (1973-04-01), Castrucci et al.
patent: 4363846 (1982-12-01), Kaneki
patent: 4489146 (1984-12-01), Bock et al.

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