Wafer holder with flexibly mounted gripping fingers

Details Wafer holder with flexibly mounted gripping fingers Wafer holder with flexibly mounted gripping fingers

1993-03-08

1995-08-29

Stinson, Frankie L.

Cleaning and liquid contact with solids

Apparatus

With means to movably mount or movably support the work or...

134157, 134902, 134200, 294115, B08D 302

Patent

active

054451728

ABSTRACT:
A single wafer processing apparatus includes a portable processing head that can be a portable module or a movable unit mounted to a supporting machine frame. The processing head has movable fingers adapted to grip a wafer. The fingers protrude from a protective wafer plate. Indexing and rotation monitoring assemblies are provided for automation of the wafer processing steps. A complementary processing base includes an upwardly-open bowl that receives a wafer held by the portable processing head. It has a full-diameter movable bottom wall for rapid draining purposes. Liquid and/or gas jets and nozzles supply fluids required within the bowl for processing of wafers.

REFERENCES:
patent: 4616971 (1986-10-01), Matrone
patent: 4651440 (1987-03-01), Karl
patent: 4715637 (1987-12-01), Hosoda et al.
patent: 4788994 (1988-12-01), Shinbara

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