Monolayer longitudinal bias and sensor trackwidth definition for

Dynamic magnetic information storage or retrieval – Head – Hall effect

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G11B 5127

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active

059496231

ABSTRACT:
A magnetoresistive (MR) head and a method are disclosed providing a longitudinal bias layer and conductor leads at end regions of sensor elements to form a sensor region between the end regions. A uniform longitudinal bias thin film layer is deposited overlaying the entirety of the upper MR sensor, and a uniform conductor thin film layer is deposited overlaying the entirety of the longitudinal bias thin film layer. A photoresist process is conducted over the conductor thin film layer to develop a mask of the end regions and to expose a central region between the end regions. A reactive-ion-etching process completely etches the conductor thin film layer in the exposed central region to expose the longitudinal bias layer in the central region, the photoresist mask is removed, and an ion milling process of the exposed longitudinal bias layer at the central region reduces the bias layer from a "bias" critical thickness to a "null" critical thickness to free the MR sensor elements, thereby forming a defined sensor region of the underlying MR sensor elements at the exposed longitudinal bias layer at the central region.

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