Position detecting method and device using image pickup of a mar

Details Position detecting method and device using image pickup of a mar Position detecting method and device using image pickup of a mar

1991-07-08

1992-06-09

Nelms, David C.

Radiant energy

Photocells; circuits and apparatus

Photocell controls its own optical systems

356401, G01N 2186, G01V 904

Patent

active

051209748

ABSTRACT:
A position detecting method and device for detecting the position of an object to be examined, through image pickup of a mark formed on the object, is disclosed. The method includes an image forming step for illuminating the mark with a radiation beam in a first direction and a second direction different from the first direction, and for forming a first image of the mark with the illumination in the first direction and forming a second image of the mark with the illumination in the second direction; a determining step for selecting one of the first and second images; and a detecting step for detecting the position of the object on the basis of the selected image or an image of the mark formed with the illumination in the direction corresponding to the selected image. The device is adapted to execute the position detection in this manner.

REFERENCES:
patent: 4251160 (1981-02-01), Bouwhuis et al.
patent: 4355892 (1982-10-01), Mayer et al.
patent: 4573791 (1986-03-01), Phillips
patent: 4668089 (1987-05-01), Oshida et al.
patent: 4669866 (1987-06-01), Phillips
patent: 4777374 (1988-10-01), Nakata et al.
patent: 4779001 (1988-10-01), Makosch
patent: 4801208 (1989-01-01), Katoh et al.
patent: 4814829 (1989-03-01), Kosugi et al.
patent: 4941745 (1990-07-01), Sugiyama

Affiliated with

Also associated with

Rating

Position detecting method and device using image pickup of a mar does not yet have a rating. At this time, there are no reviews or comments for this patent.

If you have personal experience with Position detecting method and device using image pickup of a mar, we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Position detecting method and device using image pickup of a mar will most certainly appreciate the feedback.

Rate now

Comments { 0 }

Profile ID: LFUS-PAI-O-1806439