Fishing – trapping – and vermin destroying
Patent
1987-11-04
1989-04-04
Hearn, Brian E.
Fishing, trapping, and vermin destroying
437192, 437246, 437228, 148DIG19, 357 71, H01L 21283
Patent
active
048187232
ABSTRACT:
An integrated circuit fabrication process for improving step coverage of the metal lines and of metal layer interconnections is disclosed. A conductive polysilicon, polycide, or polycide-on-polysilicon plug is formed in contact apertures by successive silicidation sequences of silicon/refractory metal deposition and heat treatment. A preceding silicide may also be removed prior to a succeeding silicidation to reduce silicon lining.
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Advanced Micro Devices , Inc.
Hearn Brian E.
Quach T. N.
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