Method for generating a strip waveguide

Details Method for generating a strip waveguide Method for generating a strip waveguide

1987-05-26

1989-04-04

Hearn, Brian E.

Fishing, trapping, and vermin destroying

437133, 437119, 437120, 437126, 437124, 437122, 148DIG50, 148DIG29, 148DIG66, 148DIG65, 148DIG72, 148DIG108, 156637, 156624, 357 16, 357 17, 372 45, 372 46, H01L 21208

Patent

active

048187224

ABSTRACT:
A method for generating a strip laser in a buried hetero-structure composed of layers, wherein a raised strip is etched out of the layer structure and the strip is laterally etched with an erosion melt. The lateral edges of the laser active layer are protected by leaving them covered with a portion of the layer dissolved out by the erosion melt. The deposits thus remaining are used to initiate the generation of an epitaxial layer which extends laterally from the laser-active layer.

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Kano et al., "Operation Characteristics of Buried-Strip GaInAsP/InP DH Lasers Made by Melt-Back Method" J. Appl. Phys., vol. 50, Dec. 1979.
Sarhidi et al., "New 1-6 .mu.m Wavelength GaInAsP/InP Buried Heterostructure Lasers", Electronics Letters, May 8, 1980.

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