Method of nanoscale patterning and products made thereby

Coating processes – Solid particles or fibers applied – Localized different areas produced

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4274301, 156659, 156654, 156656, B05D 500

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active

059484705

ABSTRACT:
Methods of nanometer pattern formation and transfer onto a selected substrate are provided wherein a selected block copolymer is coated onto the selected substrate and a component of the block copolymer is chemically modified or physically removed so that the dense periodic pattern of the block copolymer can be transferred onto the selected substrate. Substrates prepared by these methods are also provided.

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Chou, S., "Single-domain magnetic pillar array of 35 nm diameter and65 Gbits/in..sup.2 density for ultrahigh density quantum magnetic storage", J. Appl. Physics 1994 76:6673.
Douglas et al., "Transfer of Biologically Derived Nanometer-Scale Patterns to Smooth Substrates", Science 1992 257:642.
Kryder, M.H., "Magnetic thin films for data storage", Thin Solid Films 1992 216:174.
Tonucci et al., "Nonochannel Array Glass", Science 1992 258:738.
Volkmuth, W.D. and Austin, R.P.H., "DNA electrophoresis in microlithographic arrays", Nature 1992 358:600 1992.

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