Method of manufacturing image sensor

Details Method of manufacturing image sensor Method of manufacturing image sensor

1994-04-01

1994-11-01

Hearn, Brian E.

Fishing, trapping, and vermin destroying

437 3, H01L 21324

Patent

active

053607449

ABSTRACT:
A method of manufacturing an image sensor comprising light-receiving elements, thin film transistor switching elements, and a group of lines, in which the metal electrode portion of each light-receiving element, the source and drain electrode portions of each thin film transistor switching element, and the intermediate ground wiring layer of the group of wiring lines can be formed simultaneously. As a result, the image sensor can be prepared with ease under an efficient process.

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