Process for fabricating precision optical spacers for image sens

Details Process for fabricating precision optical spacers for image sens Process for fabricating precision optical spacers for image sens

1983-02-07

1985-05-07

Tufariello, Thomas

Chemistry: electrical and wave energy

Processes and products

204 384, C25D 502

Patent

active

045156620

ABSTRACT:
A process is described for fabricating spacers of a desired thickness of filters, the spacers to be used in separating the filter from an underlying image sensing device. The process includes the steps of forming a pattern of electrically conductive material on one surface of the filter, depositing dry resist to the desired thickness over all of the filter except on the electrically conductive pattern, depositing additional electrically conductive material on at least the electrically conductive pattern, and removing the dry resist.

REFERENCES:
patent: 3745094 (1973-07-01), Greene
patent: 4315985 (1982-02-01), Castellani

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