Piezoelectric vibrator and manufacturing method thereof

Details Piezoelectric vibrator and manufacturing method thereof Piezoelectric vibrator and manufacturing method thereof

1985-03-04

1987-03-17

Salce, Patrick R.

Electrical generator or motor structure

Non-dynamoelectric

Piezoelectric elements and devices

310348, 310351, 29 2535, H01L 4108

Patent

active

046510427

ABSTRACT:
A piezoelectric vibrator comprises a substrate consisting of Elinvar, in which a vibrating element is formed as an island. The vibrating element is connected to and supported by strip-like connecting portions which are connected with the surrounding frame. A piezoelectric film is formed on the surface of the vibrating element. Of the longitudinal end portions of the vibrating element in the vicinity of the connecting portions, one main surface side is formed as a thin-plate portion by etching, while the rest of the vibrating element has its thickness intact. The longitudinal edges of vibrating element are defined by etching carried out simultaneously with or after the previous etching step.

REFERENCES:
patent: 4293986 (1981-10-01), Kobayashi et al.
patent: 4583017 (1986-04-01), Nakamura et al.
patent: 4609844 (1986-09-01), Nakamura et al.

Affiliated with

Also associated with

Rating

Piezoelectric vibrator and manufacturing method thereof does not yet have a rating. At this time, there are no reviews or comments for this patent.

If you have personal experience with Piezoelectric vibrator and manufacturing method thereof, we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Piezoelectric vibrator and manufacturing method thereof will most certainly appreciate the feedback.

Rate now

Comments { 0 }

Profile ID: LFUS-PAI-O-1790153