Substrate surface potential measuring apparatus and plasma equip

Details Substrate surface potential measuring apparatus and plasma equip Substrate surface potential measuring apparatus and plasma equip

1994-11-10

1996-10-29

Karlsen, Ernest F.

Electricity: measuring and testing

Fault detecting in electric circuits and of electric components

Of individual circuit component or element

3241581, G01R 31302, G01R 1900

Patent

active

055700314

ABSTRACT:
There is provided a surface potential measuring apparatus cable of accurately measuring the potential of a substrate regardless of the material of the substrate, and a plasma equipment capable of accurately measuring and controlling ion energy. The substrate surface potential measuring apparatus measures the surface potential of a substrate in a plasma processing apparatus and includes a terminal electrically connected to a suscepter electrode for holding the substrate, a first condenser disposed between the terminal and the ground and a potential measuring device for measuring the potential of the terminal. The surface potential of the substrate is found from the potential of the suscepter electrode measured by the potential measuring means.

REFERENCES:
patent: 2412191 (1946-12-01), Zottu
patent: 2607528 (1952-08-01), McWhirter et al.
patent: 2997651 (1961-08-01), Richeson, Jr. et al.
patent: 3071688 (1963-01-01), Waddel
patent: 3243701 (1966-03-01), Strand
patent: 5273610 (1993-12-01), Thomas, III et al.

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