Microfabricated acoustic source and receiver

Details Microfabricated acoustic source and receiver Microfabricated acoustic source and receiver

1994-09-14

1996-10-29

Dougherty, Thomas M.

Electrical generator or motor structure

Non-dynamoelectric

Piezoelectric elements and devices

310311, 310334, H01L 4108

Patent

active

055699685

ABSTRACT:
A microstructure that may be used as an acoustic source or receiver. It comprises a substrate having a thicker section and a thinner section, supporting a membrane. A window is formed in the thinner section. Means are provided for inputting or sensing mechanical energy in the substrate and membrane. The microstructure allows for the design of complex mechanical frequency responses for at least partly mechanical signal processing.

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