Miniaturized mass filter

Details Miniaturized mass filter Miniaturized mass filter

1994-10-07

1996-07-16

Anderson, Bruce C.

Radiant energy

Ionic separation or analysis

B01D 5944, H01J 4900

Patent

active

055369391

ABSTRACT:
A mass filter is provided for use in a solid state mass spectrograph for analyzing a sample of gas. The mass filter is located in a cavity provided in a semiconductor substrate. The mass filter generates an electromagnetic field in the cavity which filters by mass/charge ratio an ionized portion of the sample of gas. The substrate has an inlet through which the gas to be analyzed flows through prior to reaching the mass filter. The mass filter can be either a single-focussing Wien filter or magnetic sector filter or can be a double-focussing filter which uses both an electric field and a magnetic field to separate the ions.

REFERENCES:
patent: 3955084 (1976-05-01), Giffin
patent: 4924090 (1990-05-01), Wollnik et al.
patent: 5386115 (1995-01-01), Freidhoff et al.
H. H. Bauer et al., "Instrumental Analysis", (1978), pp. 443-459.

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