Position detecting apparatus of optical interferometry

Details Position detecting apparatus of optical interferometry Position detecting apparatus of optical interferometry

1996-06-03

1998-04-07

Hellner, Mark

Optics: measuring and testing

Range or remote distance finding

With photodetection

356 41, 356 409, G01C 0308

Patent

active

057370699

ABSTRACT:
A position detecting apparatus utilizing optical interferometry changes the wavelength of a light beam from the light source. The variation in the wavelength causes an increment and decrement Cx, Co in the number of waves in the measurement and reference lengths Lx, Lo. The position data calculating section calculates the measurement length Lx on the basis of the detected increment and decrement Cx, Co and the reference length Lo according to an equation, Lx=Lo(Cx/Co). The position detecting apparatus can easily detect an absolute position of an object to be detected.

REFERENCES:
patent: 3542472 (1970-11-01), Smith-Vaniz
patent: 3970389 (1976-07-01), Mendrin et al.
patent: 5260761 (1993-11-01), Barker
patent: 5388115 (1995-02-01), Kawashima et al.
patent: 5589928 (1996-12-01), Babbitt et al.

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