Fishing – trapping – and vermin destroying
Patent
1993-05-24
1994-11-08
Hearn, Brian
Fishing, trapping, and vermin destroying
437241, H01L 2102
Patent
active
053626869
ABSTRACT:
A semiconductor device having a protective insulating film is disclosed. This semiconductor device includes a semiconductor substrate, and an interconnection pattern provided on said semiconductor substrate and electrically connected with said elements. A silicon-oxy-nitride film is provided on said semiconductor substrate so as to cover said interconnection pattern. The silicon-oxy-nitride film is deposited in accordance with a chemical vapor deposition Method using plasma, using a mixture gas including organic silane and a nitriding gas and has therefore superior step coverage. The silicon-oxy-nitride film has a superior barrier characteristic to moisture coming in from the outside. A semiconductor device superior in reliability such as moisture resistance is thus obtained.
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Hearn Brian
Hurley Lynne A.
Mitsubishi Denki & Kabushiki Kaisha
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