Polishing pad conditioning

Details Polishing pad conditioning Polishing pad conditioning

1995-07-03

1996-10-29

Meislin, D. S.

Abrading

Machine

Rotary tool

451 56, B24B 500

Patent

active

055690629

ABSTRACT:
A rotating polishing wheel having secured to its top surface a polishing pad and a vertically movable carrier element for carrying a workpiece to be polished into contact with the polishing pad and exerting a desired pressure on the workpiece. Operatively attached to the carrier is a conditioning element movable with the carrier and having on its bottom surface cutting means disposed in a circular configuration for conditioning the polishing pad by contact therewith.

REFERENCES:
patent: 5081795 (1992-01-01), Tanaka et al.
patent: 5119599 (1992-06-01), Klipper et al.
patent: 5216843 (1993-06-01), Breivogel et al.
patent: 5411431 (1995-05-01), Basstein et al.
patent: 5433650 (1995-07-01), Winebarger
patent: 5456627 (1995-10-01), Jackson et al.
patent: 5486131 (1996-01-01), Cesna et al.

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