Tool for cleaning LPCVD furnace tube

Brushing – scrubbing – and general cleaning – Machines – With air blast or suction

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Details

15401, A47L 906

Patent

active

055354718

ABSTRACT:
A tool for cleaning the interior of a tube, such as a neck portion of a processing tube of an lpcvd apparatus, or the like, has a pipe that may have at least one hole, and preferably a plurality of holes, spaced from an insulating handle along the length of the pipe in a direction toward a distal end of the pipe to allow cooling atmosphere to be drawn into the pipe. A scraper plate having a shape substantially conforming to an interior shape of the tube and a beveled peripheral edge is attached at the distal end of the pipe. A baffle plate of size smaller than the scraper plate is affixed to the scraper plate by a plurality of standoffs between the scraper plate on an exterior side opposite the interior side and the baffle plate, wherein the baffle plate forms a debris collection region between a peripheral side of the baffle plate and the tube at the exterior side of the scraper plate when the tool is inserted into the tube. A vacuum line connector may be attached to a proximate end of the tube, and, optionally, a plurality of cooling holes may be provided in the vacuum line connector to admit a cooling atmosphere into the vacuum line when it is connected to the vacuum line connector. Although the tool can be made of various suitable materials, the pipe, the scrapper and baffle plates, and the plurality of standoffs may be of stainless steel, or of a synthetic resin polymer, such as "Teflon".

REFERENCES:
patent: 1869730 (1932-08-01), Antle
patent: 1994616 (1935-03-01), Leitzell
patent: 2193999 (1940-03-01), Allen
patent: 2606338 (1952-08-01), De Lorenzo
patent: 4715838 (1987-12-01), Kulander
patent: 4976002 (1990-12-01), Leonov et al.

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