Measuring and testing – Vibration – Sensing apparatus
Patent
1999-05-21
2000-06-27
Moller, Richard A.
Measuring and testing
Vibration
Sensing apparatus
310321, G01H 1100
Patent
active
060792744
ABSTRACT:
A vibration wave detector in which: a plurality of resonator beams, each having a different length and being allowed to resonate at a specific frequency, are provided; a piezoresistor is installed in each resonator beam; and the piezoresistors are parallel-connected so that vibration is converted to an electric signal by the piezoresistors so as to output the sum of vibration waveforms at the respective resonator beams. It is possible to control a gain of a specific frequency band by changing a voltage to be applied to the parallel circuit or changing the resistance value of each piezoresistor.
REFERENCES:
patent: 3614678 (1971-10-01), Engeler et al.
patent: 5856722 (1999-01-01), Haronian et al.
Ando Shigeru
Harada Muneo
Moller Richard A.
Sumitomo Metal Industries Limited
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