Ion beam generator having concentrically arranged frustoconical

Details Ion beam generator having concentrically arranged frustoconical Ion beam generator having concentrically arranged frustoconical

1978-02-27

1978-10-10

Demeo, Palmer C.

Electric lamp and discharge devices

With positive or negative ion acceleration

Plural apertured electrodes

250423R, 313349, 313361, H05H 502

Patent

active

041198816

ABSTRACT:
A grid system for an ion beam generator is provided having a frustoconical shape so that the collimated ion beam converges at a predetermined angle toward the target to provide selective beveled etching.

REFERENCES:
patent: 2651000 (1953-09-01), Linder
patent: 2785311 (1957-03-01), Lawrence
patent: 2975277 (1961-03-01), Von Ardenne

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