Testing apparatus for semiconductor devices

Details Testing apparatus for semiconductor devices Testing apparatus for semiconductor devices

1988-10-19

1990-02-27

Karlsen, Ernest F.

Electricity: measuring and testing

Measuring, testing, or sensing electricity, per se

With rotor

324 731, G01R 3122

Patent

active

049049348

ABSTRACT:
A testing apparatus includes a turntable, a driving device for rotating the turntable by a predetermined angle, and a plurality of pallets symmetrically fixed on the turntable around a center of rotation of the turntable. Each pallet holds a plurality of semiconductor devices and has electrode patterns for connection to leads of the semiconductor devices. A tester for testing the semiconductor devices is electrically connected with the electrode patterns of one of the pallets located at a first position in the rotation of the turntable by a connecting device. An exchanging device exchanges the semiconductor devices for new ones on one of the pallets located at a second position in the rotation of the turntable. A cover covers the turntable except around the second position. A heating device heats the inside of the cover to maintain the semiconductor devices held on the pallets in the cover at a high temperature.

REFERENCES:
patent: 3094212 (1963-06-01), Moore et al.
patent: 3412333 (1968-11-01), Frick et al.
patent: 4103232 (1978-07-01), Sugita et al.
patent: 4593820 (1986-06-01), Antonie et al.

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