Mass manufacturing method of semiconductor acceleration and vibr

Details Mass manufacturing method of semiconductor acceleration and vibr Mass manufacturing method of semiconductor acceleration and vibr

1994-10-07

1999-05-18

Bowers, Jr., Charles L.

Fishing, trapping, and vermin destroying

437245, 437246, 437921, 437927, 73654, 7351401, 7351434, H01L21/00

Patent

active

059050446

ABSTRACT:
A mass manufacturing method of semiconductor acceleration and vibration sensors uses a dispensing method, a electrical plating method, a screen-printing method or a preforming method in manufacturing a mass made of metal pastes in a desired size and amount on a mass pad of a thin metal film which is formed on a beam in a given pattern, so that it can be adapted to the mass-production of the sensors having the mass of the desired amount and size.

REFERENCES:
patent: 4893509 (1990-01-01), Maliver et al.
patent: 5006487 (1991-04-01), Stokes

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