Photothermal oscillator force sensor

Details Photothermal oscillator force sensor Photothermal oscillator force sensor

1986-12-10

1988-09-20

Westin, Edward P.

Radiant energy

Photocells; circuits and apparatus

Optical or pre-photocell system

250231P, 250227, 73800, 7386259, 356352, G01D 534

Patent

active

047727861

ABSTRACT:
A sensor comprises a beam, e.g. of silicon, which resonates at a frequency dependent on the force imposed on the beam. Light on a line induces resonance of the beam by means of the photothermal effect. The light reflected from the beam is amplitude modulated at the resonance frequency, and returns along the line. It is reflected by a semi-reflecting plane mirror onto a lens which focusses it onto a photodetector. The photodetector produces an output voltage modulated at the oscillation frequency, and is thus representative of the force imposed on beam 1.

REFERENCES:
patent: 4322967 (1982-04-01), Seitel et al.
patent: 4379226 (1983-04-01), Sichling et al.
patent: 4470313 (1984-09-01), Kalinoski et al.
patent: 4678904 (1987-07-01), Saask et al.
patent: 4678909 (1987-07-01), Jackson et al.
patent: 4713540 (1987-12-01), Gilby et al.
1600883, 02-1978, General Resistance, Inc.

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