Means for periodic desorption of a cryopump

Refrigeration – Low pressure cold trap process and apparatus

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55269, 62383, 165 32, 417901, B01D 500

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active

044386320

ABSTRACT:
The invention discloses a cryopump comprising a primary cryopanel 67 associated with a low temperature heat sink 60 having means for adsorbing a first low boiling point gas and a secondary cryopanel 80 associated with heat sink 60 and a higher temperature heat sink 48 having means for condensing a higher boiling point gas. There are means 90 for selectively conducting heat to the primary cryopanel to raise the temperature of the cryopanel above that which is necessary to cause said first gas to become desorbed from said cryopanel while having minimal effect on the capacity of the higher temperature heat sink.

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B. Denhoy et al., "Degassing a Large LHe Cryopump," Lawrence Livermore Laboratory, University of California, n.d.

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