Composite insulator structure

Details Composite insulator structure Composite insulator structure

1983-09-20

1986-07-15

Lesmes, George F.

Stock material or miscellaneous articles

Structurally defined web or sheet

Including variation in thickness

357 54, 357 71, 428164, 428213, 428448, 428472, 428698, 428699, 430314, B32B 300

Patent

active

046006249

ABSTRACT:
A composite insulator structure separating adjacent layers of patterned metal on an LSI chip is disclosed. The composite insulator consists of a relatively thick layer of sputtered oxide and a thin layer of plasma nitride. The relatively thin layer can be underneath, inside or on top of the thick layer. The relatively thin layer is conformal and able to cover projections on the underlying metal and prevent interlevel shorting between the patterned layers.

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Bartush et al, IBM TDB, vol. 24(12), p. 6451, May 1982.
Dalal et al, IBM TDB, vol. 26(3B), p. 1513, Aug. 1983.
Bartush et al, IBM TDB, vol. 23(11), p. 4907, Apr. 1981.

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