Fishing – trapping – and vermin destroying
Patent
1988-02-01
1990-02-27
Hearn, Brian E.
Fishing, trapping, and vermin destroying
437229, 437910, 357 5, 505832, 365162, 1566591, 148DIG89, H01L 2144
Patent
active
049046195
ABSTRACT:
A method of producing a Josephson junction device consisting of thin films of superconducting materials such as niobium and niobium nitride that work at cryogenic temperatures, in which a base electrode layer, tunnel barrier layer and a counterelectrode layer constituting a Josephson junction are formed on a substrate. In order to form a desired electrode pattern on the counterelectrode layer, a resist pattern is used as a mask for dry etching, followed by a plasma ashing process for ablating part of the resist in order to form a terrace-shaped portion at the edges and corners of the counterelectrode pattern by reforming and shrinking the cross-sectional geometry of the resist. Then, a thin insulating film for covering the edged layers is deposited over the entire surface of substrate, followed by the removal of said resist pattern together with said insulating film deposited on said resist pattern in order to form a protecting layer around the counterelectrode pattern. The substrate further undergoes subsequent stages to produce a Josephson junction device.
REFERENCES:
patent: 4418095 (1983-11-01), Young et al.
patent: 4432134 (1984-02-01), Jones et al.
patent: 4548834 (1985-10-01), Tsuge et al.
patent: 4560435 (1985-12-01), Brown et al.
Appl. Phys. Lett. 41(11) 12/1982 "New fabrication process for Josephson tunnel junctions with (niobium nitride, nobium) double-layered electrodes" by Akira Shoji, et al. pp. 1097-1099.
Forster et al., "Planar Area Definition Using Two-Level Self-Aligned Insulation Scheme", IBM Technical Disclosure Bulletin, vol. 26, No. 8, Jan. 1984, pp. 4254-4255.
Takukatsu Yoshida, Manufacture of Josephson Junction Element, Jul. 17, 1986 vol. 10 No. 205-61-46081 (A).
Hisanao Tsuge, Manufacture of Josephson Junction Element, Mar. 7, 1986, vol. 10 No. 58-60-2088747 (A).
Takukatsu Yoshida, Manufacture of Josephson Junction Element, Mar. 25, 1986 vol. 11 No. 95-61-245585 (A).
Hirano Mikio
Kizaki Sachiko
Mori Hiroyuki
Tarutani Yoshinobu
Yamada Hirozi
Hearn Brian E.
Hitachi , Ltd.
Wilczewski M.
LandOfFree
Method of forming Josephson junction devices does not yet have a rating. At this time, there are no reviews or comments for this patent.
If you have personal experience with Method of forming Josephson junction devices, we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Method of forming Josephson junction devices will most certainly appreciate the feedback.
Profile ID: LFUS-PAI-O-174048