Projection system capable of effecting precise focus adjustment

Details Projection system capable of effecting precise focus adjustment Projection system capable of effecting precise focus adjustment

1982-10-19

1986-07-15

Corbin, John K.

350419, G02B 312, G02B 314

Patent

active

046002758

ABSTRACT:
Between the object plane and the image plane of a projection optical system, a liquid is held by and between a plurality of plate-like solid optical elements formed of a transparent material, and the spacing between these solid optical elements is varied to vary the layer thickness of the liquid, thereby adjusting the focus position of the optical system.

REFERENCES:
patent: 1954755 (1934-04-01), Heine
patent: 3498695 (1970-03-01), Brouwer
patent: 4208101 (1980-06-01), Trapp et al.
patent: 4331388 (1982-05-01), McCrobie et al.
patent: 4387970 (1983-06-01), Brueggemann

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