Turbo-molecular pump

Details Turbo-molecular pump Turbo-molecular pump

1983-02-10

1985-03-05

Scott, Samuel

Rotary kinetic fluid motors or pumps

With control means responsive to motion developed fluid...

415 14, 415107, 415118, 415132, 417354, 417365, 384603, F04D 2904

Patent

active

045028320

ABSTRACT:
A turbo-molecular pump has passive magnetic bearings which are radially stable but axially unstable and mechanical thrust bearings acting axially, the magnetic bearings and the stator forming a structural unit movable axially within the pump housing and connected to an element adjustably supporting one thrust bearing while the other thrust bearing is fixed to the housing with control gear being provided for adjusting the structural unit relative to the housing and the thrust bearing relative to the structural unit in dependence on force sensing devices.

REFERENCES:
patent: 2993448 (1961-07-01), Garey
patent: 3399827 (1968-09-01), Schwartzman
patent: 3749528 (1973-07-01), Rousseau et al.
patent: 3759626 (1973-09-01), Becker
patent: 3828610 (1974-08-01), Swearingen
patent: 3861818 (1975-01-01), Eggenberger
patent: 4023920 (1977-05-01), Bachler et al.
patent: 4036565 (1977-07-01), Becker
patent: 4057369 (1977-11-01), Isenberg et al.
patent: 4116592 (1978-09-01), Cherny et al.
patent: 4302963 (1981-12-01), Collins

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