Method and apparatus for providing data age compensation in an i

Details Method and apparatus for providing data age compensation in an i Method and apparatus for providing data age compensation in an i

1996-06-04

1998-06-16

Font, Frank G.

Optics: measuring and testing

By dispersed light spectroscopy

Utilizing a spectrometer

356345, G01B 902

Patent

active

057679720

ABSTRACT:
An improved method and apparatus for compensating for differences in the data age of the measurements among measurement axes in an interferometer (18), such as a heterodyne interferometer, in which known values of time delay occur in the measurement (34, 38, 38a, 41 and 42) and reference signal (44) paths. A time value is measured (52) for the signal transmission over these paths for a given clock (48) period interval and the measured time value (52) is adjusted (56) for the given interval against the known time delay for compensating for the data age. The known time delay is subtracted from the measured time value for providing the adjusted time value (60) for the given interval. The adjusted time value (60) is converted into a phase measurement, and this phase measurement is converted into the dynamic interferometric position measurement (64, 68) for providing a position measurement (72, 74) independent of any velocity of movement of the object whose position is being measured and having reduced data age differences between the signal paths providing the measurement.

REFERENCES:
patent: 4688940 (1987-08-01), Sommargren et al.
patent: 5249030 (1993-09-01), Field et al.
Benedict and Bordner, "Synthesis of an Optimal Set of Radar Track-While-Scan Smoothing Equations*", pp. 27-32 (IRE Transactions on Automatic Control, Apr. 1962).
N. Bobroff, "Recent advances in displacement measuring interferometry", pp. 907-926 (Meas. Sci. Technol. 4, 1993) (no month available).
"HP 10897A High Resolution VMEbus Laser Axis Board", Operating Service Manual, Hewlett Packard Company, Aug. 1993.

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