Thin film, method and apparatus for forming the same, and electr

Details Thin film, method and apparatus for forming the same, and electr Thin film, method and apparatus for forming the same, and electr

1997-05-20

2000-11-28

Meeks, Timothy

Coating processes

Coating by vapor, gas, or smoke

4272555, 4272556, 4272557, 4273722, 4273855, C23C 1424

Patent

active

061532592

ABSTRACT:
A method for forming a thin film includes the steps of: supplying a deposition material in the form of a liquid onto a heated surface; heating and vaporizing the deposition material on the heated surface while the deposition material is undergoing movement; and depositing the deposition material onto a deposition surface. The deposition material is supplied onto a position of the heated surface where the vaporized deposition material does not reach the deposition surface.

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patent: 4230650 (1980-10-01), Guignard
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patent: 4828905 (1989-05-01), Wada et al.
patent: 5178902 (1993-01-01), Wong et al.
patent: 5496620 (1996-03-01), Kitakami et al.
Search Report for EPO Application No. 97108188.0-; Dated Jul. 16, 1998.
Search Report for Application No. 97108188.0; Dated Oct. 26, 1998 (EPO).

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