Substrate stripping and cleaning apparatus

Details Substrate stripping and cleaning apparatus Substrate stripping and cleaning apparatus

1975-05-19

1976-11-09

Bleutge, Robert L.

Cleaning and liquid contact with solids

Apparatus

With plural means for supplying or applying different fluids...

134104, 134140, 134145, 134177, 134200, B08B 302

Patent

active

039904628

ABSTRACT:
A substrate stripping and cleaning apparatus including a closed bowl with an exhaust vent and a liquid drain, a rotating turntable in the bowl carrying baskets of substrates, a spray post with multiple fluid passages, orifices and spray nozzles directing rinsing spray outwardly against the turntable and substrates, rinsing water manifold pipes on the turntable and revolving therewith and having nozzles directing rinsing water to all portions of the inner surfaces of the bowl, the pipes being supplied with water through passages in the drive shaft for the turntable.

REFERENCES:
patent: 2003003 (1935-05-01), Marbury
patent: 2208646 (1940-07-01), Saunders et al.
patent: 2562076 (1951-07-01), Weisselberg
patent: 3413827 (1968-12-01), Kochanek
patent: 3769992 (1973-11-01), Wallestad

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