Semiconductor dynamical quantity sensor device having electrodes

Details Semiconductor dynamical quantity sensor device having electrodes Semiconductor dynamical quantity sensor device having electrodes

1999-05-05

2000-11-28

Moller, Richard A.

Measuring and testing

Speed, velocity, or acceleration

Acceleration determination utilizing inertial element

73862, G01P 15125, G01L 100

Patent

active

061519669

ABSTRACT:
A semiconductor accelerometer device is formed on an SOI substrate by micro-machining. A movable unit is supported at both ends, and a weight portion is movable in response to acceleration exerted in the detection direction. A movable electrode is formed in a comb shape integrally with the weight portion. A pair of fixed electrodes in a comb shape are cantilevered and interleaved with the movable electrode to face the movable electrode. A plurality of through holes is provided in the electrodes so that the electrodes have Rahmen structure which is a series of rectangular frames. This structure reduces the weight of each electrode while increasing the strength against twist force. The electrodes are less likely from breaking in response to an acceleration exerted in a direction perpendicular to the normal detection direction because of reduced weight.

REFERENCES:
patent: 5563343 (1996-10-01), Shaw et al.
patent: 5610335 (1997-03-01), Shaw et al.

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