Volatile CVD precursors based on copper alkoxides and mixed grou

Details Volatile CVD precursors based on copper alkoxides and mixed grou Volatile CVD precursors based on copper alkoxides and mixed grou

1993-03-10

1994-04-26

Dees, Jose G.

Organic compounds -- part of the class 532-570 series

Organic compounds

Heavy metal containing

C07F 108

Patent

active

053068360

ABSTRACT:
Fluorinated alkoxy compounds of copper, copper-calcium, copper-strontium, and copper-barium having the structure:

REFERENCES:
patent: 4260712 (1981-04-01), Aggarwal et al.
patent: 4681959 (1987-07-01), Ayen et al.
patent: 4717584 (1988-01-01), Aoki et al.
Stafford et al., Can. J. Chem., 53, 1975, 817.
Loeb et al., Inorg. Chem., 18, No. 11, 1979, 3160.
Purdy et al., "New Alkoxides of Copper and the Alkaline and Alkaline-Earth aterials Crystal Structures of Na.sub.2 Cu [OCH(CF.sub.2).sub.2 ].sub.4 ", Inorg. Chem. 30, 2812-2819 (1991).

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