Surface acoustic wave device with optimized ratio of film thickn

Wave transmission lines and networks – Coupling networks – Electromechanical filter

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310313A, 310313B, H03H 964, H03H 9145

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active

059146451

ABSTRACT:
In a surface acoustic wave device comprising a substrate of lithium tantalate or lithium niobate, and interdigital electrodes formed on the substrate and made of a thin film consisting primarily of aluminum, the interdigital electrodes are optimized in the ratio of the thickness of the film to the period of a plurality of electrode digits connected to a common terminal with propagation loss taken as an objective function. The ratio is set in the range of 0.03 to 0.10 to ensure a lower propagation loss than in the prior art.

REFERENCES:
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Tonami et al., "On the Leaky Acoustic Surface Waves Propagating on LiTaO.sub.3 and LiNbO.sub.3 Substrates"; Proceedings of the 15th Symposium on Fundamentals and Applications of Ultrasonic Electronics, pp. 185-186 (1994).
Kanda et al., "Temperature Characteristics of Love-Type SAW Resonators on SiO.sub.2 /Au/Y-x LiTaO.sub.3 Structure", Proceedings of the 1994 IEICE (Institute of Electronics, Information and Communication Engineers) Spring Conference, "A-437", pp. 1-440.
Kanada et al., "Experiment of Love-Type SAW Resonators Utilizing Au/Y-X LiTaO.sub.3 "; Proceedings of the 1994 IEICE (Institute of Electronics, Information and Communication Engineers) Spring Conference, "A-438", pp. 1-441.
Japanese Journal of Applied Physics, vol. 29, (1990) Supplement 29-1, pp. 119-121, "Characteristic of Leaky Surface Waves Propagating on Li.sub.2 B.sub.4 O.sub.7 Substrate with a Thin Aluminum Plate," by Masao Murota and Yasutaka Shimizu.
Japanese Journal of Applied Physics, vol. 30, (1991) Supplement 30-1, pp. 143-145, "Effects of aluminum Thickness on the Temperature Characteristics of Leaky Surface Wave Filters on LST-cut Quartz Substrate," by Masao Murota, Tetsuya Hirano, C.S. Lam, D.E. Holt and Yasutaka Shimizu.

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