Fishing – trapping – and vermin destroying
Patent
1991-11-19
1993-12-14
Thomas, Tom
Fishing, trapping, and vermin destroying
437235, 437238, 437239, 427488, 427535, H01L 2100, H01L 2102, H01L 21469
Patent
active
052702677
ABSTRACT:
A method of producing insulating layers over a semiconductor substrate comprising spinning a film of spin-on-glass (SOG) over a semiconductor substrate, precuring the film of SOG at an elevated temperature sufficient to remove the bulk of solvent and curing the film of SOG in a plasma in a plasma reactor of a type exhibiting a self-biased R.sub.F discharge adjacent the SOG for a period of time sufficient to exclude the bulk of SiOH, organic volatiles and H.sub.2 O from the layer.
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Butherus, O.sub.2 plasma-converted Spin-on-Glass for Planarization, J. Vac. Sci. Technol. B3(5), Sep. 1985, pp. 1352-1356.
Schiltz, Advantages of Using Spin-On-Glass Layer in Interconnection Dielectric Planarization, Microelectronic Engineering, 1986, pp. 413-421.
Pliskin, Comparison of Properties of Dielectric Films Deposited by Various Methods, J. Vac. Sci. Technol., vol. 14, No. 5, Sep. 1977, pp. 1065-1081.
Takamatsu, Evaluations of Plasma Silicon-Oxide Film (P-SiO) by Infrared Absorption, J. Electrochem. Soc.: Sol-State Sci. & Tech., Feb. 1986, pp. 443-445.
Everhart B.
Mitel Corporation
Thomas Tom
LandOfFree
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